(CH
3
)
3
SiH
Trimethylsilane
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—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
PF1/4
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‰E(0.35L)
SUS(D)
ˆ³—Í’²�®Ší
Regulator
TUSƒVƒŠ�[ƒY
(CH
3
)
3
SiH
R
99.97%
Research
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CH
3
SiH
3
Monomethylsilane
ƒ‚ƒmƒ�ƒ`ƒ‹ƒVƒ‰ƒ“
�@
—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
PF1/4
�¶
‰E(0.35L)
SUS(D)
ˆ³—Í’²�®Ší
Regulator
TUSƒVƒŠ�[ƒY
CH
3
SiH
3
R
99.97%
Research
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GeF
4
Germanium Tetrafluoride
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�@
—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
PF1/4
‰E
‰E(0.35L)
SUS(D)
GeF
4
R
99.99%
Research
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