”¼“±‘Ì»‘¢—pƒKƒX Semiconductor Gases

SiF4
Silicon Tetrafluoride
Žlƒtƒb‰»ƒPƒC‘f
•s”R« “Å« •…H«
@
—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
PF1/4
‰E
‰E(0.35L)
SUS(D)
ˆ³—Í’²®Ší
Regulator
TUSƒVƒŠ[ƒY

SiF4 R
99.999% Research
’@Žß

Si2H6
Disilane
ƒWƒVƒ‰ƒ“
‰Â”R« “Å«
@
—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
SUS(D),B(D)
ˆ³—Í’²®Ší
Regulator
TUSƒVƒŠ[ƒY
 
Si2H6 R
99.99% Research
’@Žß

SiH4
Monosilane
ƒ‚ƒmƒVƒ‰ƒ“
‰Â”R« “Å«
@
—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
PF1/4

‰E(0.35L)
SUS(D),B(D)
ˆ³—Í’²®Ší
Regulator
TUSƒVƒŠ[ƒY

SiH4 R
99.999% Research
’@Žß •Ê–¼@…‘f‰»ƒPƒC‘fAƒVƒ‰ƒ“