”¼“±‘Ì�»‘¢—pƒKƒX Semiconductor Gases

PF3
Phosphorous Trifluoride
ŽOƒtƒb‰»ƒŠƒ“
•s”R�« “Å�«
�@
—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
PF1/4
‰E
‰E(0.35L)
SUS(D)
ˆ³—Í’²�®Ší
Regulator
TUSƒVƒŠ�[ƒY

PF3 R
99.99% Research
’��@Žß ˆã–ò—pŠO“Å•¨

PH3
Phosphine
ƒzƒXƒtƒBƒ“
‰Â”R�« “Å�«
�@
—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm
PF1/4
�¶
‰E(0.35L)
SUS(D),B(D)
ˆ³—Í’²�®Ší
Regulator
TUSƒVƒŠ�[ƒY

PH3 S
99.9999% Special
PH3 R
99.999% Research
’��@Žß •Ê–¼�@�…‘f‰»ƒŠƒ“�@ˆã–ò—pŠO“Å•¨

SF6
Sulfur Hexafluoride
˜Zƒtƒb‰»—°‰©
•s”R�«
�@
—eŠíƒoƒ‹ƒu
Cylinder Valve
22mm ‰E LG
B
ˆ³—Í’²�®Ší
Regulator
TUSƒVƒŠ�[ƒY
 
SF6 S
99.999% Special
SF6 R
99.99% Research
’��@Žß